4-DOF SOI-MEMS ultrasonic energy harvester

Title: 4-DOF SOI-MEMS ultrasonic energy harvester
Creator: Fowler, Anthony G.; Moheimani, S. O. Reza
Relation: 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO). Proceedings of the 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO) (Rome, Italy 27-30 July, 2015) p. 1481-1484
Publisher Link: http://dx.doi.org/10.1109/NANO.2015.7388922
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: conference paper
Date: 2016
Description: A silicon-on-insulator microelectromechanical systems (MEMS)-based energy harvester potentially suitable for applications such as implanted biomedical systems is presented. Designed to be mechanically excited by an external source of ultrasonic waves, the harvester features a novel 4-degree-of-freedom resonant mechanism that allows the device to generate electrical energy in any orientation. Experimental testing of the fabricated harvester shows that the device is able to generate 50.9nW, 60.6nW, and 14.3nW of electrical power when excited by ultrasonic waves directed from the x, y, and z directions, respectively.
Subject: 4-DOF; MEMS; energy harvesting; ultrasonic
Identifier: http://hdl.handle.net/1959.13/1316001
Identifier: uon:23051
Identifier: ISBN:9781467381550
Language: eng
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